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4D Technology Corporation
Sub. of Onto Innovation

3280 E Hemisphere Loop
Suite 146
Tucson, AZ 85706
United States

Phone: +1 520-294-5600

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Metrology Module

Name: Metrology Module
Brand: 4D Technology Corporation

Photonics.com
May 2015TUCSON, Ariz., May 18, 2015 — 4D Technology FlexCam

The FlexCam metrology module from 4D Technology Corp. is a high-resolution 3-D metrology system for in situ, roll-to-roll measurement of flexible electronics.

The device provides subnanometer vertical resolution and microscale lateral resolution for in-process roughness and defect quantification for measurement of substrates, barrier films and intermediate layers. The FlexCam also identifies and quantifies defects, registering their position within the roll.

The module provides 100 percent inspection in the machine direction for web speeds up to 1 m per minute.

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