Search
Menu
Photonics SuppliersFilm Thickness Monitors
Full company details
Bruker Nano Surfaces
Div. of Bruker Corp.
Map5255 E Williams Circle, Suite 2080
Tucson, AZ 85711
United States
Phone: +1 520-741-1044
Fax: +1 520-294-1799
Toll-free: +1 800-873-9750

Characterization of Advanced Semiconductor Materials and Processes with Nanoscale IR Spectroscopy

Author: Stephen Hopkins Wednesday, March 31, 2021
This application note demonstrates the successful application of Tapping AFM-IR to distinguish the chemical footprints of several nanoscale lithographic patterns consisting of complex molecular assemblies with excellent spatial resolution of 4 nm. Additionally, nanoscale IR spectroscopy also excels in the characterization of nanoscale defects.

More white papers
Download White Paper
File: Characterization_of_Advanced_Semiconductor_Materials.pdf (3.49 MB)
To download this white paper, please complete the *required fields before clicking the "Download" button.
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address:
Address 2:
City:
State/Province:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required

When you click "Send Request", we will record and send your personal contact information to Bruker Nano Surfaces by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.