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A 0.19 e- rms Read Noise 16.7 Mpixel Stacked Quanta Image Sensor with 1.1 µm-Pitch Backside Illuminated Pixels

Author: Jiaju Ma, Dexue Zhang, Omar A. Elgendy, and Saleh Masoodian Friday, February 11, 2022
This paper reports a 16.7 Mpixel, 3D-stacked backside illuminated Quanta Image Sensor (QIS) with 1.1 µm-pitch pixels which achieves 0.19 e- rms array read noise and 0.12 e- rms best single-pixel read noise under room temperature operation. The accurate photon-counting capability enables superior imaging performance under ultra-low-light conditions. The sensor supports programmable analog-to-digital convertor (ADC) resolution from 1-14 bits and video frame rates up to 40 fps with 4096 x 4096 resolution and 600 mW power consumption.