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Intlvac Thin Film Corp.

1401 Duff Dr.
Suite 600
Fort Collins, CO 80524
United States

Phone: +1 970-305-8508

Toll-free: +1 800-959-5517

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Intlvac PARMS for Sputtered IR Films

Name: Intlvac PARMS for Sputtered IR Films
Brand: Intlvac Thin Film Corp.

Photonics Showcase
Apr 2024

The Nanochrome IV PARMS produces dielectric thin film layers by reactive magnetron sputtering with final reaction and film densification at the substrate surface using a high current, low energy ion source. Reactive operation results in faster deposition times. Low pressure sputtering achieves higher deposition rates. Films are made reactively to produce highly dense, pure oxides and nitrides suitable for the UV, VIS NIR, SWIR and MWIR ranges.

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