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Materion Balzers Optics
Bus. Unit of Materion Corporation
Map2 Lyberty Way
Westford, MA 01886-3690
United States
Phone: +1 978-692-7513
Fax: +1 978-692-1443
Toll-free: +1 800-327-1355

Microelectromechanical Systems

Microelectromechanical SystemsMaterion Balzers Optics has coating techniques for MEMS wafers, depositing a wide range of UV, optical, and visible coatings patterned by photolithography. Our 200-mm wafer fabrication can provide many of the operations required for fabrication on glass or silicon. Materion is one of the few fabs that can perform lithography on wafers with topography features etched at 0.2 mm deep.

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