Full company details
NTT Advanced Technology Corp.
Tokyo Opera City Tower
3-20-2, Nishi-shinjuku
Shinjuku, Tokyo 163-1436
Japan
Multilayer Coating for Extreme Ultraviolet Experiments
Author: Masatoshi Hatayama
Friday, December 4, 2020
Extreme ultraviolet (EUV) multilayer coatings have been designed and fabricated for many kinds of experiments including high-order harmonics application. In this paper, we present recent results obtained with Ru/B4C, Mo/Si, Zr/Al-Si, SiC/Mg multilayer coatings, at corresponding wavelength region of 8 nm – 50 nm. These multilayer coatings can be easily customized depending on experimental requirements, including the incident angle, peak wavelength, and bandwidth.