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Ohara Corporation
Map23141 Arroyo Vista, Suite 200
Rancho Santa Margarita, CA 92688
United States
Phone: +1 949-858-5700
Fax: +1 949-858-5455

Precision Polished Substrates

Ohara Corp - Precision Polished SubstratesOhara is a world-class manufacturer of high-quality double-side lapped and polished substrates suitable for use at 248 nm. Exhibiting unmatched cleanliness, precision, and surface roughness and flatness values, Ohara’s substrates boast a remarkable array of features that make them the standout choice for an array of cutting-edge applications.

Ohara supplies polished substrates made with the following materials: quartz, fused silica, optical glass, silicon, and more.

Precision Polished Substrates are available in sizes anywhere from 25 to 360 mm in diameter. Ohara also supplies 5- to 6-in. square photomask substrates as well as custom sizes.

Superior Surface Roughness & Flatness Values:
Ohara’s substrates deliver exceptional RMS values of ~2 Angstroms (via AFM) and flatness values of ~1 micron (via Tropel Flatmaster), making it the perfect choice for applications requiring high-performance, precision, and accuracy.

High Refractive Index Wafers:
Ohara’s high index (nd 1.8 - 2.001) Precision Polished Substrates display excellent transmittance, outstanding chemical resistance, and are ideal for low-cost, high-performance consumer applications including AR/VR and other wearable devices.

Flawless Quality:
One of the key advantages of Ohara’s Precision Polished Substrates is its exceptional cleanliness. With a 16 bath Megasonic Cleaning Unit, automated scrubbing, and a Class 100 Clean Room, these wafers are made to ensure consistent and reliable performance in various optical elements.

Excellent Metrology Capabilities:
Ohara's commitment to metrology is evident in its use of the following equipment: Atomic Force Microscope (AFM), Zygo New View and Zygo GPI Interferometers, and Tropel Flatmaster.

Ohara SK1300 Precision Polished Substrates are used at the forefront of cutting-edge technology, including wafers for Thin-Film Transistors (TFT), substrates for photomasks, optical elements for semiconductor devices, and so much more.

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