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Photonics Buyers' Guide / Hexapods / PI (Physik Instrumente) LP, Sub. of Physik Instrumente (PI) GmbH & Co. KG, Motion Control, Air Bearings, Piezo Mechanics
Full company details
PI (PHYSIK INSTRUMENTE) LP
SUB. OF PHYSIK INSTRUMENTE (PI) GMBH & CO. KG
MOTION CONTROL, AIR BEARINGS, PIEZO MECHANICS
Map16 Albert St.
Auburn, MA 01501
United States
Phone: +1 508-832-3456
Fax: +1 508-832-0506

Advances in Nanometer Precision Motion Control in Industry and Research

Author: Scott Jordan, Brian Lula, Stefan Vorndran Monday, April 20, 2020
1) High performance motion control is key for automation and alignment applications, found in semiconductor manufacturing, laser/materials processing, optical inspection, or additive manufacturing. High-speed synchronization, high throughput and reliability are no longer mutually exclusive with sub-┬Ám accuracy.

2) Nanopositioning mechanisms aid progress in fields as diverse as genomics, photonics, defense, and semiconductors. The latest designs include hexapods, compact air bearings and piezo-motors.

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File: PI_Advances_in_Nanometer_Precision_Motio.pdf (1.46 MB)
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