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PI (Physik Instrumente) LP
Sub. of Physik Instrumente (PI) GmbH & Co. KG
Motion Control, Air Bearings, Piezo Mechanics
Map16 Albert Street
Auburn, MA 01501
United States
Phone: +1 508-832-3456
Fax: +1 508-832-0506

Industry Leading Fast Focus Stages

PI’s latest breakthrough designs, based on voice-coil motors and piezo-flexure amplified actuators, provide longer travel, higher dynamics, better resolution, higher guiding precision, and improved versatility. It’s a solution for fast focusing and scanning tasks in semiconductor metrology, microscopy, life sciences, and slide scanning applications.

User friendliness in terms of installation, operation, flexibility, adaptability, software, and controls have also been re-envisioned.

   •   7 mm Travel with Voice Coil Motor
   •   800 μm Travel with Piezo Flexure Motor
   •   Built-in, Adjustable Counterbalance
   •   Millisecond Step and Settle
   •   Nanometer Precision

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