Full company details
PerkinElmer
68 Elm St.
Hopkinton, MA 01748
United States
Phone: +1 508-435-9500
Fax: +1 508-435-3439
Toll-free: +1 800-446-0035
Analysis of Metallic Impurities in Si Wafers Using Fully Automated VPD-ICP-MS
Tuesday, June 8, 2021
This work demonstrates the coupling of an IAS Expert_PS VPD (vapor phase decomposition) system with the Perkinelmer NexION® 5000 ICP-MS, delivering a fully automated, reliable solution for the determination of metallic impurities introduced during Si wafer production, thanks to the ICP-MS' sensitivity and ability to remove spectral inferences when performing trace analysis in combination with a platform that eliminates manual operation and chemical exposure to operators to prevent Si wafer contamination.
More white papers