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AVIOR M-300 (Sputtering System)

  • Model: AVIOR M-300 (Sputtering System)
  • Company: Solayer GmbH
  • Type: Other
  • Applications: Communications, Industrial, Scientific Research, Other
  • Dual-Rotary-Magnetron: 600 mm length
  • Film Uniformity: ≤± 0.2%
  • Substrate Size: ≤ 300 mm
  • Chamber Capacity: 12 (300 mm), 24 (150 mm)

The AVIOR M-300 sputtering system is designed for the deposition of optical coatings.

Applying CARS process, the system is capable of achieving shift-free coatings at ultra precision.

In CARS process, no reactive gas is used during the sputter process(sputter-up). The absence of reactive gases during sputtering eliminates all the disadvantages of reactive sputtering.

Solayer GmbH
Selingenstadter Str. 100
63791 Karlstein
Germany
Phone: +49 6188 9547100
Fax: +49 6188 9547101
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