AVIOR M-300 (Sputtering System)
- Model: AVIOR M-300 (Sputtering System)
- Company: Solayer GmbH
- Type: Other
- Applications: Communications, Industrial, Scientific Research, Other
- Dual-Rotary-Magnetron: 600 mm length
- Film Uniformity: ≤± 0.2%
- Substrate Size: ≤ 300 mm
- Chamber Capacity: 12 (300 mm), 24 (150 mm)
The AVIOR M-300 sputtering system is designed for the deposition of optical coatings.
Applying CARS process, the system is capable of achieving shift-free coatings at ultra precision.
In CARS process, no reactive gas is used during the sputter process(sputter-up). The absence of reactive gases during sputtering eliminates all the disadvantages of reactive sputtering.
Sachsenallee 28
01723 Kesselsdorf, Saxony
Germany
Phone: +49 35204 269900
Fax: +49 35204 269909