EBeam Ion Source Parts

Fil-Tech is a woman owned family business that has supplied consumable parts to optical coaters and semiconductor manufacturers for over 45 years.

Fil-Tech stocks parts for Temescal and Telemark electron beam guns, including filaments, insulators, beam formers, anodes, electromagnetic coils, and OFHC copper crucibles and covers. Fil-Tech has crucible liners in Graphite, Mo, W, VC, BN, Cu, Al2O3 and other materials. We have replacement parts for Commonwealth Mark I and Mark II ion sources, including filaments, insulators, gas distributors in graphite, stainless steel and titanium, anodes, and cathode tips.

We manufacture 6MHz and 5MHz Quality Crystals® in Gold, Longer Life Gold®, and Stress Relieving Alloy®, for vacuum applications. Fil-Tech’s NEW Extreme Temperature Crystals in Gold and Stress Relieving Alloy are stable in the 200C range with fewer rate spikes caused by high temperature processes. We also manufacture Liquid Plating Polished crystals for measurements in liquid or gas, in 1” and .550” diameters and coated in gold, titanium, alloy, copper, zinc, SiO2. Fil-Tech manufactures a complete line of sensor hardware including single and dual feedthroughs on 1” bolts or 2 3/4” flanges, single and dual sensor heads with shutters, and sputter heads in stainless steel or copper.

Fil-Tech has thin film monitors and introducing our NEW QCM1000 Quality Crystal Microbalance which measures resonant frequency and impedance of 5MHz crystals in gas or liquid. Frequency and impedance change linearly with the mass and viscosity of material deposited on the surface of the crystal. Our QCM1000 uses an innovative automatic gain control circuitry that allows it to maintain oscillation with lossy films in highly viscous liquids like undiluted Glycerol with impedance up to 10K.