HELIOS series

The HELIOS series sputtering tool is a flexible platform for fast, precise and fully-automated thin-film coatings. It specializes in high-quality optical coatings featuring very low absorption and scattering.

PARMS process technology
High and stable deposition rates
Optimal film oxidation, high density and low loss
Rapid prototyping and short time-to-market
Co-sputtering for intermediate index tuning
Extremely high process stability