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HELIOS series


The HELIOS series sputtering tool is a flexible platform for fast, precise and fully-automated thin-film coatings. It specializes in high-quality optical coatings featuring very low absorption and scattering.

PARMS process technology
High and stable deposition rates
Optimal film oxidation, high density and low loss
Rapid prototyping and short time-to-market
Co-sputtering for intermediate index tuning
Extremely high process stability
HELIOS series

Buhler Inc., Business Area Leybold Optics
100 Aeroglide Dr.
Cary, NC 27511
United States
Phone: +1 919-987-1660
Fax: +1 919-851-6029
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