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Nessy series


The Nessy series provides coatings for extreme-ultraviolet (EUV) mirrors under ultrahigh vacuum (UHV) conditions, ideal for R&D and mass production EUV lithography, X-ray measuring devices, synchrotron radiation optics and other scientific applications.

- UHV base pressure: < 9 * 10–9 mbar
- Outstanding, defect-free film quality
- Statistical layer precision in subatomic range (e.g. 7 nm +/- 0.25 %)
- Suited for numerous materials (including Mo and Si for EUV mirrors)
Nessy series

Buhler Inc., Business Area Leybold Optics
100 Aeroglide Dr.
Cary, NC 27511
United States
Phone: +1 919-987-1660
Fax: +1 919-851-6029
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