STARpro

The STARpro reactive single-magnetron sputtering system covers a wide range of applications through the use of Si3N4 and SiO2 layer stacks. Compact and easy to install, ideal for small-batch optical filter production, rapid prototyping, and R&D.

- Versatile coating system for small-batch production
- Spot-on accuracy and high reproducibility
- Extremely easy to install and operate
- Direct on wafer sputtering
- Optical monitoring with automated test slight exchange
- SECS/GEM Interface