Vacuum Deposition and Etch Equipment
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Phone: +1 412-247-0992
Fax: +1 412-247-0993
- Type: Coating Systems
- Applications: Astronomy, Biomedical/Medical, Communications, Industrial, Military, Scientific Research
- Wafer Diameters: 76 - 200 mm
- Chamber: Self cleaning; compact
High rate, low pressure enhanced discharge with very low particle generation for defect-free and densified films.
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