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NanoPos Hexapod

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10 allee Charles Babbage
F-30035 Nimes

Full Company Details
Phone: +33 4 66 29 43 88

NanoPos Hexapod
  • Type: Hexapod
  • Applications: Biomedical/Medical, Scientific Research, Nanopositioning, Fiber Optic Alignment, Other
  • Max. Load: 500g
  • Mass: 505g
  • Height: 68mm
  • X-Axis Range: 5mm
  • Y-Axis Range: 5mm
  • Z-Axis Range: 4mm
  • Max. Linear Speed: 1mm/s
  • Max. Rotation Speed (degrees/s): 1
  • Resolution Tx, Ty, Tz: 10 nm
  • Resolution Rx, Ry, Rz: 1 µrad
  • Repeatability Tx, Ty, Tz: ± 75 nm
  • Repeatability Rx, Ry, Rz: ± 2 µrad

A miniature hexapod of 68 mm height for positioning and adjustment of precision components in 6 degrees of freedom with a 10 nm resolution.
Small size due to the integration of extremely compact piezo stages from MICRONIX USA, high quality joints and low friction mechanical parts. HV and UHV versions are available.
NanoPos Hexapod
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