- Model: Dektak XTL
- Company: Bruker Nano Surfaces
- Type: Optical
- Applications: Industrial, Material Science
- Stylus Force: 0.03 mg to 15 mg
- Vertical Range: 1 mm
- Vertical Resolution: 1Å max. (@6.55 µm range)
This stylus profiler provides accurate, repeatable, and reproducible metrology for a wide range of applications. With its ability to accommodate samples up to 350 mm × 350 mm, this system brings Dektak performance to 200 mm and 300 mm wafer manufacturing.
5255 E Williams Circle, Suite 2080
Tucson, AZ 85711
United States
Phone: +1 520-741-1044
Fax: +1 520-294-1799
Toll-free: +1 800-873-9750