● IAD deposition
● 60 points optical control system
● RF ion source
● Automatic Control
● E-type double EB gun
● 6 pieces rotation crystal control system
56 Zhangba 6th Rd.
High-Tech Zone
Xi'an, Shaanxi 710077
China
Phone: +86 29 8956 0050
Fax: +86 29 8177 5810