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A-322 Planar Air Bearing Stage


3 × 4-Motor Designs, Granite Base
- 3 Models: Base, Plus, Ultra
- 500 × 1000 mm max. travel
- 15 kg load
- 1 nm resolution
- Active yaw control flex coupling
- Dynamic error mapping
- 1 m/sec / 2 g max. acceleration
A-322 Planar Air Bearing Stage

PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics
16 Albert Street
Auburn, MA 01501
United States
Phone: +1 508-832-3456
Fax: +1 508-832-0506
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