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Phone: +1 781-878-8442
Fax: +1 781-878-8736
Toll-free: +1 800-877-2234
- Type: Linear Stage
- Applications: Biomedical/Medical, Industrial, Scientific Research, Microscopy, Metrology, Other
- Max. Load: 25kg
- X-Axis Travel Length: 302mm
- Y-Axis Travel Length: 302mm
- Stage Type: Motorized
- Minimum Step Size: 0.04 µm
- XY Repeatability: ±0.7 µm
- Stepper Motor: High precision stepper
- Linear Slides: 4 mm precision bearings
The H112 stage is ideal for scanning a wide range of semiconductor wafers, photomasks, flat panel displays and printed circuit boards. The H112 can easily accommodate 12-inch (300 mm) wafers and works with many robot arm wafer loaders. In addition, the H112 can be used for transmitted light applications with 250 mm × 250 mm transmitted light area.
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