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NPS-XY-100 Series Nanopositioning Stages


The NPS-XY-100 is a piezo scanned flexure guided stage with integrated capacitance position sensors and is capable of subnanometer resolution and reproducibility. Finite element analysis of the flexure guidance mechanisms has reduced parasitic angular motions to less than 25 µrad over the full 100 µm range.
NPS-XY-100 Series Nanopositioning Stages

Prior Scientific Instruments Ltd.
Units 3-4 Fielding Ind'l Estate
Wilbraham Rd., Fulbourn
Cambridge CB21 5ET
United Kingdom
Phone: +44 1223 881711
Fax: +44 1223 881710
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