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XYZ Positioner with integrated tilting stage - Pentor

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piezosystem jena Inc.
2B Rosenfeld Dr.
Hopedale, MA 01747
United States

Full Company Details
Phone: +1 508-634-6688
Fax: +1 508-634-6868

XYZ Positioner with integrated tilting stage - Pentor
  • Type: Nanopositioning Stage
  • Applications: Biomedical/Medical, Industrial, Scientific Research, Nanopositioning, Microscopy, Metrology, Other
  • Max. Load: 50kg
  • Mass: 450g
  • Height: 40mm
  • X-Axis Travel Length: 100µm
  • Y-Axis Travel Length: 100µm
  • Z-Axis Travel Length: 100µm
  • Stage Type: Motorized
  • Driver Included?: Yes
  • Motion Closed Loop: 80 μm
  • Resolution: 0.2 nm
  • Tilt Motion: 2 μrad
  • Resolution tilt: 0.008 μrad
  • Capacitance (per axis) ±20%: 1.7 μF
  • Resonant Frequenzy: 680/ 750/ 580m Hz

Combination of a three axis translation system and a two axis tilting system
Free center hole with 17 mm diameter
Integrated preload
Translation of each axis: up to 100 µm, Tilt in each direction: ±2 mrad
Solid state flexure hinges design, without mechanical play
Temperature compensated
The primary components made from stainless steel, bottom and top plates in black anodized aluminum
XYZ Positioner with integrated tilting stage - Pentor
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