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Dektak XTL

  • Company: Bruker Nano Surfaces
  • Type: Optical
  • Applications: Industrial, Material Science
  • Stylus Force: 0.03 mg to 15 mg
  • Vertical Range: 1 mm
  • Vertical Resolution: 1Å max. (@6.55 µm range)

This stylus profiler provides accurate, repeatable, and reproducible metrology for a wide range of applications. With its ability to accommodate samples up to 350 mm × 350 mm, this system brings Dektak performance to 200 mm and 300 mm wafer manufacturing.
Dektak XTL

Bruker Nano Surfaces
5255 E Williams Circle, Suite 2080
Tucson, AZ 85711
United States
Phone: +1 520-741-1044
Fax: +1 520-294-1799
Toll-free: +1 800-873-9750
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