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Electron Beam Gun Replacement Parts


Fil-Tech is a woman-owned family business that has supplied consumable parts to optical coaters and semiconductor manufacturers for over 50 years.

Fil-Tech stocks parts for Temescal and Telemark electron beam guns, including filaments, insulators, beam formers, anodes, electromagnetic coils, and OFHC copper crucibles and covers. Fil-Tech has crucible liners in Graphite, Mo, W, VC, BN, Cu, Al2O3 and other materials. We have replacement parts for Commonwealth Mark I and Mark II and Ion Tech ion sources, including filaments, insulators, gas distributors in graphite, stainless steel and titanium, anodes, and cathode tips.

We supply Fil-Tech and INFICON 6MHz and 5MHz Quality Crystals® in Gold, Longer Life Gold®, and Stress Relieving Alloy®, for vacuum applications. We also offer Liquid Plating Polished crystals for measurements in liquid or gas, in 1” and .550” diameters and coated in gold, titanium, alloy, copper, zinc, SiO2. Fil-Tech manufactures a complete line of sensor hardware including single and dual feedthroughs on 1” bolts or 2 3/4” flanges, single and dual sensor heads with shutters, and sputter heads in stainless steel or copper. We also offer INFICON sensor hardware at competitive prices.

Fil-Tech is an Authorized Distributor of INFICON thin film monitors including the SQM-160 and STM-2XM and INFICON XTC/3, SQC-310, IC6 and Cygnus 2 thin film controllers. Call us for competitive pricing on monitors and controllers.
Electron Beam Gun Replacement Parts

Fil-Tech Inc.
6 Pinckney St.
Boston, MA 02114
United States
Phone: +1 617-227-1133
Fax: +1 617-742-0686
Toll-free: +1 800-743-1743
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