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HXP1000-MECA

  • Company: MKS/Newport
  • Type: Hexapod
  • Applications: Biomedical/Medical, Industrial, Scientific Research, Nanopositioning, Microscopy, Metrology, Fiber Optic Alignment, Other
  • Max. Load: 450kg
  • Mass: 25kg
  • Height: 395mm
  • X-Axis Range: 155mm
  • Y-Axis Range: 138mm
  • Z-Axis Range: 79mm
  • Max. Linear Speed: 9mm/s
  • Max. Rotation Speed (degrees/s): 2.8
  • Min. Incremental X Motion: 0.30 µm
  • Min. Incremental Y Motion: 0.30 µm
  • Min. Incremental Z Motion: 0.16 µm
  • X Repeatability: ± 0.15 µm
  • Y Repeatability: ± 0.15 µm
  • Z Repeatability: ± 0.08 µm

High load single device with six independent axes of motion: X, Y, Z, pitch, roll, and yaw. Light and compact design, with high stiffness.
HXP1000-MECA

MKS/Newport
1791 Deere Ave.
PO Box 19607
Irvine, CA 92606
United States
Phone: +1 949-863-3144
Toll-free: +1 877-835-9620
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