Photonics ProductsCoatings & MaterialsCoating Equip. & AccessoriesCoating Systems


The STARpro reactive single-magnetron sputtering system covers a wide range of applications through the use of Si3N4 and SiO2 layer stacks. Compact and easy to install, ideal for small-batch optical filter production, rapid prototyping, and R&D.

- Versatile coating system for small-batch production
- Spot-on accuracy and high reproducibility
- Extremely easy to install and operate
- Direct on wafer sputtering
- Optical monitoring with automated test slight exchange
- SECS/GEM Interface

Buhler Inc., Business Area Leybold Optics
100 Aeroglide Dr.
Cary, NC 27511
United States
Phone: +1 919-987-1660
Fax: +1 919-851-6029
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.