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STARpro


The STARpro reactive single-magnetron sputtering system covers a wide range of applications through the use of Si3N4 and SiO2 layer stacks. Compact and easy to install, ideal for small-batch optical filter production, rapid prototyping, and R&D.

- Versatile coating system for small-batch production
- Spot-on accuracy and high reproducibility
- Extremely easy to install and operate
- Direct on wafer sputtering
- Optical monitoring with automated test slight exchange
- SECS/GEM Interface
STARpro

Buhler Inc., Business Area Leybold Optics
100 Aeroglide Dr.
Cary, NC 27511
United States
Phone: +1 919-987-1660
Fax: +1 919-851-6029
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