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Glossary
  • pattern A device that determines the lens shape in the cutting or edging phase of fabrication. It also is used to denote the arrangement of markings on a reticle.
  • reticle An optical element located at an image plane, containing a pattern that assists in pointing an instrument or measuring target characteristics. It may be as simple as a pair of crossed lines or a complex pattern. In semiconductor pattern generation,...
lens shapetest patterning testing patterns testing patters test patternstargetsfabricationreticleoptical elementopticstest & measurement
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