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Zygo Corporation

21 Laurel Brook Rd.
Middlefield, CT 06455
United States

Phone: +1 860-347-8506

Toll-free: +1 800-ZYGO NOW

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Optical Software

Name: Optical Software
Brand: Zygo Corporation

Photonics Spectra
Dec 2022 Optical Profiler Software

The Mx^™ software from Zygo Corp. and Digital Surf is designed for optical profilers with the Mountains^® Advanced Contour module.

The software powers complete system control, data acquisition, and analysis, including rendering interactive 3D maps, quantitative topography data, intuitive navigation, and built-in statistical process control. Users can use the profile slices captured in Mx and calculate critical dimensions geometries such as 2D angles, profile circles, step heights, feature sizes, diameters, and distances. It provides its robust measurements, flexible analyses, intuitive user interface, and easy configuration of automated measurement sequences.

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