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Zygo Corporation
Map21 Laurel Brook Rd.
Middlefield, CT 06455
United States
Phone: +1 860-347-8506
Toll-free: +1 800-ZYGO NOW
SPIE Optifab 2017 Booth: 315

Ultra-High Resolution Interferometer

Ultra-High Resolution InterferometerZYGO's Verifire™ HDX laser interferometer system offers best-in-class spatial resolution and optical imaging, enabling advanced surface metrology of optical components and systems, including enhanced characterization and analysis of mid-spatial frequency. The new optical design delivers pixel-limited performance, superior ITF, and fast acquisition. Key features include a high-speed 3.4k × 3.4k (11.6 megapixel) sensor with a frame rate of 96 Hz at full resolution, and ZYGO's leading QPSI™ vibration-robust on-axis acquisition technology.

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