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attocube systems AG
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85540 Haar, Munich
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Displacement Feedback for Closed Loop Nanopositioning Systems

Author: Dr. Danilo M. Schmidt Wednesday, January 30, 2019
Piezo-based nanopositioners for moving objects in nanometer range require ultra-precise displacement sensors to increase motion stability and accuracy. A nine axis positioner setup was implemented in a high vacuum environment and our laser interferometer was used for displacement feedback. This closed loop positioning system provided a stability of a few nanometers, while the IDS3010 was capable of identify even steps of 10 pm. In this specific setup, in total three IDS3010 were used for eight measurement axes that were synchronized by the BiSS-C interface.

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