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Cryopumps

Acryopump is a vacuum pump in which pressure is reduced by condensing gases on surfaces cryogenically cooled to about 20 K (liquid hydrogen) or 4 K (liquid helium).

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Glossary
  • cryopump A vacuum pump in which pressure is reduced by condensing gases on surfaces cryogenically cooled to about 20 K (liquid hydrogen) or 4 K (liquid helium).
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