Glossary
- epitaxy A well controlled thin films technique for growing films with good crystal structure in ultra high vacuum environments at very low deposition rates. Epitaxy methods are well known for the growing of single crystals in which chemical reactions...
- epitaxial Epitaxial refers to the growth of a crystalline layer on a crystalline substrate in such a way that the orientation of the crystal lattice of the growing layer is related to that of the substrate. In other words, epitaxial growth involves the...
- epitaxial equipment Epitaxial equipment refers to a set of specialized tools and systems used in the process of epitaxy, which is the growth of crystalline layers on a substrate material. Epitaxial growth is a critical process in semiconductor manufacturing, allowing...
single crystalsMBEmolecular beam epitaxyliquid phase epitaxyvapor phase epitaxyoptics