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Photonics Buyers' Guide / Scatterometers
Glossary
  • scatterometer An instrument used to determine the absolute or relative scatter levels of optical surfaces.
  • scatterometry A measurement technique used for the rapid quantitative evaluation of surface quality based on the detection and analysis of light scattered from the surface.
scatter levelsscatterometryscatterometric measurementscatter measurementoptical surface measurementoptical surfaces scatteringtest & measurement
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