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PVA METROLOGY & PLASMA SOLUTIONS GMBH
MEMBER OF THE PVA TEPLA AG GROUP
Ammerthalstr. 34
D-85551 Kirchheim
Germany
Phone: 49 89 90503 0
Fax: 49 89 90503 185
Specializes in microwave and RF plasma systems (single wafer, batch or strip- inline type) for Si and compound wafers. Typical markets include power device, HBLED, MEMS, 3DIC, OLED and solar cell manufacturing. Front end applications include photoresist ashing and descum, polymer and SU8 or sacrificial layer removal for MEMS devices.

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