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VISTEC ELECTRON BEAM GMBH
Ilmstr. 4
D-07743 Jena
Germany
Phone: +49 3641 7998 0
Fax: +49 3641 7998 222
Develops and manufactures e-beam lithography equipment based on variable shaped beam (VSB) technology for a wide range of semiconductor and nanotechnology applications including silicon direct write, compound semiconductor, mask making, advanced research and integrated optics.
Established: 2006

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