Cryopumps

Acryopump is a vacuum pump in which pressure is reduced by condensing gases on surfaces cryogenically cooled to about 20 K (liquid hydrogen) or 4 K (liquid helium).

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Dr. Juergen Christian Mueller - Frankfurt am Main, Germany

Glossary

cryopump A vacuum pump in which pressure is reduced by condensing gases on surfaces cryogenically cooled to about 20 K (liquid hydrogen) or 4 K (liquid helium).

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