Microlithography Equipment

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Heidelberg Instruments Inc. - Torrance, CA

Heidelberg Instruments Mikrotechnik GmbH - Heidelberg, Germany

SUSS MicroTec Inc. - Corona, CA

SUSS MicroTec SE - Garching, Germany

Glossary

microlithography A technique for producing micron-size structures on surfaces by using short-wavelength light or electron beams.

Microlithography Equipment Suppliersmicrolithography equipmentmicron size structuressub-micronsubmicronshort-wavelengthlight electron beamlasers

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