Photonics Handbook

Photonics is the study of light and other types of radiant energy whose quantum unit is the photon. The impact of photonics on research, technology, navigation, culture, astronomy, forensics, and...

By its original definition, a nanopositioning device is a mechanism capable of repeatedly delivering motion in increments as small as one nanometer. Lately demands from industry and research have...

An interferometer is an instrument that compares the position or surface structure of two objects. The basic two-beam division of amplitude interferometer components consists of a light source, a...

Designing devices that incorporate ultrathin films is an important means of enhancing yields. However, characterizing ultrathin films provides a challenge for mainstream metrology tools such as...

The market for flat panel displays (FPDs) has undergone tremendous growth, driven mostly by increased demand for televisions, cell phones, computers, digital cameras and MP3 players. Similarly,...

Ultraprecision machining can be defined in general terms as the removal of material from a substrate utilizing a machine tool that operates at a resolution of 10 nm (0.4 μin.) or less. The...

Abbe Error — Linear off-axis errors introduced by angular deviations coupled to a moment arm at the point of interest on stage mounted devices (θ in Figure 1). The effect of Abbe error...

Conditions on the factory floor and in industrial cleanrooms with high-capacity air filtration systems can hamper the use of interferometry. Another problem is the testing of large-aperture mirrors...