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1 supplier
Electron-Beam Lithography Systems
An electron-beam lithography system is a sophisticated nanofabrication tool used in the semiconductor industry and research laboratories to pattern extremely fine features with sub-micrometer or even nanometer-scale resolution. EBL systems utilize a focused beam of electrons to directly write patterns onto a substrate coated with a thin layer of electron-sensitive resist material.
Learn more about electron-beam lithogrphy systems →
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Vistec Electron Beam GmbH
- Jena, Germany
Glossary
electron-beam lithography system
An electron-beam lithography (EBL) system is a sophisticated nanofabrication tool used in the semiconductor industry and research laboratories to pattern extremely fine features with sub-micrometer or even nanometer-scale resolution. EBL systems...
Electron-Beam Lithography Systems Suppliers
lasers
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EBL
electron-sensitive resist material
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