Abbreviations/Acronyms

atomic layer deposition

atmospheric pressure chemical vapor deposition

axial vapor deposition

chemical vapor deposition; compact videodisc

dynamic pulse position modulation

global positioning system

ion-assisted deposition

ion-beam-assisted deposition

laser chemical vapor deposition

molecular beam epitaxy — A well-controlled thin film technique for growing films with good crystal structure in ultra high vacuum environments at very low deposition rates. MBE is also commonly used in the manufacture of semiconductor devices and solar cells.

modified chemical vapor deposition

metallorganic chemical vapor deposition

nonsymmetrical modified chemical vapor deposition

outside vapor deposition

plasma chemical vapor deposition

pulsed laser deposition

pulse position modulation

position-sensing detector; pseudo-second derivative

physical vapor deposition

target angular position

vapor axial deposition