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eH400 Ion Source
Kaufman & Robinson Inc.
Category:
Coatings & Materials / Coating Equip. & Accessories
Type:
Other
Dimensions:
3.7" D x 3" H
Discharge Voltage/Current:
50-300 V/5 A
Operating Gases:
Ar, Xe, Kr, O2, N2, Organic Precursors
Photonics Products
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