S neox Five Axis - Complete 3D Metrology System

The S neox Five Axis 3D Optical profiler combines a high-accuracy rotational module with the advanced inspection and analysis capabilities of the S neox 3D Optical profiler. This enables automatic 3D surface measurements at defined positions which can be combined to create a complete 3D volumetric measurement. S neox 3D measurement technologies cover a wide range of scales, including form (Focus Variation), subnanometric roughness (Interferometry) or critical dimensions that require high lateral resolution as well as vertical resolution (Confocal).