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S neox Five Axis - Complete 3D Metrology System



The S neox Five Axis 3D Optical profiler combines a high-accuracy rotational module with the advanced inspection and analysis capabilities of the S neox 3D Optical profiler. This enables automatic 3D surface measurements at defined positions which can be combined to create a complete 3D volumetric measurement. S neox 3D measurement technologies cover a wide range of scales, including form (Focus Variation), subnanometric roughness (Interferometry) or critical dimensions that require high lateral resolution as well as vertical resolution (Confocal).

3D optical profilercomplete 3D metrology systemroughnesstexturesurface metrologysurface measurementcritical dimensionsmicroscalenanoscale

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