High performance motion control is key for automation and alignment applications, found in semiconductor manufacturing, laser/materials processing, optical inspection, or additive manufacturing.
Advances in Nanometer Precision Motion Control in Industry and Research
1) High performance motion control is key for automation and alignment applications, found in semiconductor manufacturing, laser/materials processing, optical inspection, or additive manufacturing. High-speed synchronization, high throughput and reliability are no longer mutually exclusive with sub-µm accuracy.
2) Nanopositioning mechanisms aid progress in fields as diverse as genomics, photonics, defense, and semiconductors. The latest designs include hexapods, compact air bearings and piezo-motors.
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