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WHITE PAPER: Air Bearing Nano-Positioning Stages: When to Use over Mechanical Stages (3/9/2016)

WHITE PAPER: Air Bearing Nano-Positioning Stages: When to Use over Mechanical Stages

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Air Bearing Nano-Positioning Stages: When to Use over Mechanical Stages

Air bearing nano-positioning stages provide several advantages over mechanical bearings. A direct-drive motor and high-resolution encoder can position a moving carriage supported by an air bearing to within nanometers in a linear application or within tenths of arc seconds in rotational applications. The lack of friction and mechanical contact means there is no wear and negligible hysteresis or reversal error, making it highly repeatable and ideal for many inspection and manufacturing operations. The lack of friction allows for smooth, controlled velocity (stability <0.01%).

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