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Prior Scientific Inc.
80 Reservoir Park Dr.
Rockland, MA 02370
United States

Full Company Details
Phone: +1 781-878-8442
Fax: +1 781-878-8736
Toll-free: +1 800-877-2234
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Prior Scientific Inc.

H112 ProScan Stage
  • Type: Linear Stage
  • Applications: Biomedical/Medical, Industrial, Scientific Research, Microscopy, Metrology, Other
  • Max. Load: 25kg
  • X-Axis Travel Length: 302mm
  • Y-Axis Travel Length: 302mm
  • Stage Type: Motorized
  • Minimum Step Size: 0.04 µm
  • XY Repeatability: ±0.7 µm
  • Stepper Motor: High precision stepper
  • Linear Slides: 4 mm precision bearings

The H112 stage is ideal for scanning a wide range of semiconductor wafers, photomasks, flat panel displays and printed circuit boards. The H112 can easily accommodate 12-inch (300 mm) wafers and works with many robot arm wafer loaders. In addition, the H112 can be used for transmitted light applications with 250 mm × 250 mm transmitted light area.
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