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microVEGA™ xMR


This system provides high-throughput laser annealing for monolithic magnetic sensor formation. A highly flexible tool configuration, it can accommodate both Giant Magnetoresistance (GMR) and Tunnel Magnetoresistance (TMR) sensors, as well as easily adjust magnetic orientation, sensor position and sensor dimension; making it an ideal solution for magnetic sensor production.
microVEGA™ xMR

3D-Micromac AG
Technologie-Campus 8
09126 Chemnitz
Germany
Phone: +49 371 40043 222
Fax: +49 371 40043 40
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