Aug 2001Mad City Labs Inc.Request Info
A piezoactuated rotation stage for mask alignment and laser beam steering has been introduced by Mad City Labs Inc. The Nano-Theta has a total range of motion of 2.0 mrad, with submillirad resolution under closed-loop control, making it suitable for applications that require precision position measurement. It has an accessible axis of rotation, is mountable in most orientations and has fully integrated position sensors. The rotation stage is available in aluminum and invar and can be modified for vacuum compatibility or to meet specific requirements.