Sep 1997Star Tech Instruments Inc.Request Info
Star Tech Instruments Inc. has developed the HT-500C probe for
measuring the uniformity of high-power lamps at the wafer plane. This
instrument was designed to operate at temperatures up to 500 °C without
loss of accuracy. Other features include 5% long-term stability, 5%
error over the design temperature range, linearity over approximately
five orders of magnitude and cosine angle dependence of over ±70°.
Larger probes are available for lamps up to 300 mm in diameter.