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DEEP-UV LASER

Photonics Spectra
Jan 2002
Coherent Inc.Request Info
 
Coherent Inc.'s Laser Div. has introduced a continuous-wave, diode-pumped, deep-UV laser that is designed for integration into semiconductor metrology tools. The Azure laser emits a 266-nm wavelength, which enables detection of smaller wafer defects. An onboard series of automated capabilities allow hands-free operation by controlling beam pointing, maintaining a constant output power of 200 mW at 266 nm, shifting the crystal and relocking the cavity. The company says the laser provides ultralow-noise characteristics, stability and long life.


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